Characterization of Sputtered Coatings with Various Nitrogen Content Deposited from High Aluminum Alloyed TiAlV Target
نویسندگان
چکیده
In this study, a Ti50Al40V10 single alloying target is used to deposit TiAlVN coatings by direct current (dc) magnetron sputtering technique. The structural, mechanical, and frictional properties of final deposited at various N2 content are investigated. It reveals that coating transforms from single-phase (cubic phase) dual-phase structure hexagonal phases) with the increase content. highest hardness (∼36.5 GPa) elastic modulus (∼372 GPa), good adhesion strength (∼24.4 N) achieved in sample flow rate 6 sccm, which determined nano-indentation scratch test measurements. addition, 3 sccm has lowest friction coefficient dry oily conditions.
منابع مشابه
SiNx Coatings Deposited by Reactive High Power Impulse Magnetron Sputtering: Process Parameters Influencing the Nitrogen Content.
Reactive high power impulse magnetron sputtering (rHiPIMS) was used to deposit silicon nitride (SiNx) coatings for biomedical applications. The SiNx growth and plasma characterization were conducted in an industrial coater, using Si targets and N2 as reactive gas. The effects of different N2-to-Ar flow ratios between 0 and 0.3, pulse frequencies, target power settings, and substrate temperature...
متن کاملCharacterization of Magnetron Sputtered Coatings by Pulsed Eddy Current Techniques
A method that uses induced pulsed eddy currents for characterization of thick magnetron sputtered Nb coatings on steel is presented in this paper. The objectives of this work are to develop a system for rapid quantitative nondestructive inspection of coatings as well as to determine the correlation between coating properties, such as density and purity, and eddy current measured resistivity of ...
متن کاملEvolution of sputtered tungsten coatings at high temperature
Related Articles Stability of deflected-beam metal–insulator–metal tunneling cathodes under high acceleration voltage J. Vac. Sci. Technol. B 31, 042203 (2013) Simple Si(111) surface preparation by thin wafer cleavage J. Vac. Sci. Technol. A 31, 023201 (2013) Novel techniques for modifying microtube surfaces with various periodic structures ranging from nano to microscale J. Vac. Sci. Technol. ...
متن کاملPhotocatalytic Activity of Reactively Sputtered Titania Coatings Deposited Using a Full Face Erosion Magnetron
Titanium dioxide (titania) is widely used as a photocatalyst for its moderate band gap, high photoactivity, recyclability, nontoxicity, low cost and its significant chemical stability. The anatase phase of titania is known to show the highest photocatalytic activity, however, the presence of this phase alone is not sufficient for sustained activity. In this study TiO2 coatings were deposited on...
متن کاملThick Sputtered Tantalum Coatings for High-Temperature Energy Conversion Applications
Thick sputtered tantalum (Ta) coatings on Inconel were investigated as a potential replacement for bulk refractory metal substrates used for high-temperature emitters and absorbers in thermophotovoltaic energy conversion applications. In these applications, high-temperature stability and high reflectance of the surface in the infrared wavelength range are critical in order to sustain operationa...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Materials transactions
سال: 2021
ISSN: ['1345-9678', '1347-5320']
DOI: https://doi.org/10.2320/matertrans.mt-m2020285